Microelectromechanical systems

Microelectromechanical systems (MEMS) are small integrated devices or systems that combine electrical and mechanical components. They range in size from the sub micrometer (or sub micron) level to the millimeter level, and there can be any number, from a few to millions, in a particular system. MEMS extend the fabrication techniques developed for the integrated circuit industry to add mechanical elements such as beams, gears, diaphragms, and springs to devices.

Examples of MEMS device applications include inkjet-printer cartridges, accelerometers, miniature robots, microengines, locks, inertial sensors, microtransmissions, micromirrors, micro actuators, optical scanners, fluid pumps, transducers, and chemical, pressure and flow sensors. New applications are emerging as the existing technology is applied to the miniaturization and integration of conventional devices.